| Scanning Range: | 380 nm to 950 nm, standard |
| Spectrum Resolution: | 2 nm |
| Precision: | 0.2 nm |
| Measurement Speed: | 2 sec. |
| Measurement Spot Size: | Varies by Magnification; 50 microns at 5X magnification, 25 microns at 10X magnification, 13 microns at 20X magnification, and 7 microns at 40X magnification For greater precision, inquire about a Custom Built Unit |
| Viewing Methods: | 2" camcorder screen, and dual microscope eyepiece lenses can be used to view the measurement spot |
| TOP LAYER | SECOND LAYER | THIRD LAYER | FOURTH LAYER | ||||||
| FILM TYPE | Objective Lens Magnification | RANGE | std dev | RANGE | std dev | RANGE | std dev | Range | std dev |
| P1/P2/ITO/Oxide/Glass | 5X |
100-3,000Å |
3Å |
100-3,000Å |
3Å |
100-1500Å |
3Å |
100-1,000Å |
3Å |
| Oxide/Si | 5X, 10X | 200-3,000Å |
2Å |
||||||
| 3,000-50,000Å |
5Å |
||||||||
| 40X | 200-3,000Å |
2Å |
|||||||
| 3,000-20,000Å |
5Å |
||||||||
| Nitride/Si | 5X, 10X | 150-2,000Å |
2Å |
||||||
| 2,000-20,000Å |
2Å |
||||||||
| 40X | 150-2,000Å |
2Å |
|||||||
| 2,000-20,000Å |
3Å |
||||||||
| Photoresist/Si | 5X, 10X, 40X | 500-20,000Å |
5Å |
||||||
| Nitride/Oxide/Si | 5X, 10X | 150-20,000Å |
5Å |
|
|
||||
| Poly/Oxide/Si | 5X, 10X | 100-5,000Å |
5Å |
|
|
|
|||
| Oxide/Poly/Oxide/Si | 5X, 10X | 100-10,000Å |
5Å |
0-5,000Å |
5Å |
0-10,000Å |
5Å |
||
| Oxide/Al | 5X, 10X, 40X | 2,000-20,000Å |
5Å |
||||||
| Photoresist/Cr | 5X, 10X, 40X | 500-20,000Å |
5Å |
||||||
| Oxide/NiFe | 5X, 10X, 40X | 2,000-10,000Å |
5Å |
||||||
| 5X, 10X | 10,000-50,000Å |
20Å |
|||||||
| 5X | 50,000-150,000Å |
100Å |
|
|
|||||
| Photoresist/Glass | 5X, 10X, 40X | 500-20,000Å |
10Å | ||||||
| Customized film types can also be created for your applications. | |||||||||