Scanning Range: | 380 nm to 1700 nm, standard |
Spectrum Resolution: | 4 nm |
Precision: | 0.3nm |
Measurement Speed: | 5 sec. |
Measurement Spot: | 5X Objective is 200 microns, 10X Objective is 100 microns, 20X Objective is 50 microns, 40X Objective is 25 microns |
Viewing Methods: | 2" camcorder screen, and dual microscope eyepiece lenses can be used to view the measurement spot |
TOP LAYER | SECOND LAYER | THIRD LAYER | FORTH LAYER | ||||||
FILM TYPE | Objective Lens Magnification | RANGE | std dev | RANGE | std dev | RANGE | std dev | RANGE | std dev |
P1/P2/ITO/Oxide/Glass | 5X,10X |
100-30000 |
5 |
100-10000 |
5 |
100-2000 |
5 |
100-3000 |
5 |
Oxide/Si | 5X, 10X |
200-3000 | 2 | ||||||
3000-50000 | 5 | ||||||||
40X |
200-3000 | 2 | |||||||
150-20000 | 5 | ||||||||
Nitride/Si | 5X, 10X |
150-2000 | 2 | ||||||
2000-20000 | 3 | ||||||||
40X |
150-2000 | 2 | |||||||
2000-10000 | 3 | ||||||||
Photoresist/Si | 5X, 10X, 40X |
500-20000 | 5 | ||||||
Ni/Ox/Si | 5X, 10X |
150-20000 | 5 | 0-10000 | 5 | ||||
Poly/Ox/Si | 5X, 10X |
100-5000 | 5 | 5 | |||||
Ox/Poly/Ox/Si | 5X, 10X |
100-10000 | 5 | 0-5000 | 5 | 0-10000 | 5 | ||
Ox/Al | 5X, 10X, 40X |
2000-20000 | 5 | ||||||
Photoresist/Cr | 5X, 10X, 40X |
500-20000 | 5 | ||||||
Ox/NiFe | 5X, 10X, 40X |
2000-10000 | 5 | ||||||
5X, 10X |
10000-50000 | 20 | |||||||
5X |
50000-150000 | 100 | |||||||
Photoresist/Glass | 5X, 10X, 40X |
500-20000 | 10 |