| Scanning Range: | 380 nm to 1700 nm, standard |
| Spectrum Resolution: | 4 nm |
| Precision: | 0.3nm |
| Measurement Speed: | 5 sec. |
| Measurement Spot: | 5X Objective is 200 microns, 10X Objective is 100 microns, 20X Objective is 50 microns, 40X Objective is 25 microns |
| Viewing Methods: | 2" camcorder screen, and dual microscope eyepiece lenses can be used to view the measurement spot |
| TOP LAYER | SECOND LAYER | THIRD LAYER | FORTH LAYER | ||||||
| FILM TYPE | Objective Lens Magnification | RANGE | std dev | RANGE | std dev | RANGE | std dev | RANGE | std dev |
| P1/P2/ITO/Oxide/Glass | 5X,10X |
100-30000 |
5 |
100-10000 |
5 |
100-2000 |
5 |
100-3000 |
5 |
| Oxide/Si | 5X, 10X |
200-3000 | 2 | ||||||
| 3000-50000 | 5 | ||||||||
40X |
200-3000 | 2 | |||||||
| 150-20000 | 5 | ||||||||
| Nitride/Si | 5X, 10X |
150-2000 | 2 | ||||||
| 2000-20000 | 3 | ||||||||
40X |
150-2000 | 2 | |||||||
| 2000-10000 | 3 | ||||||||
| Photoresist/Si | 5X, 10X, 40X |
500-20000 | 5 | ||||||
| Ni/Ox/Si | 5X, 10X |
150-20000 | 5 | 0-10000 | 5 | ||||
| Poly/Ox/Si | 5X, 10X |
100-5000 | 5 | 5 | |||||
| Ox/Poly/Ox/Si | 5X, 10X |
100-10000 | 5 | 0-5000 | 5 | 0-10000 | 5 | ||
| Ox/Al | 5X, 10X, 40X |
2000-20000 | 5 | ||||||
| Photoresist/Cr | 5X, 10X, 40X |
500-20000 | 5 | ||||||
| Ox/NiFe | 5X, 10X, 40X |
2000-10000 | 5 | ||||||
5X, 10X |
10000-50000 | 20 | |||||||
5X |
50000-150000 | 100 | |||||||
| Photoresist/Glass | 5X, 10X, 40X |
500-20000 | 10 | ||||||