| Scanning Range: | 380 nm to 950 nm, standard |
| Spectrum Resolution: | 2 nm |
| Precision: | 0.2 nm |
| Measurement Speed: | 2 sec. |
| Measurement Spot Size: | 50 microns at 5X magnification For greater precision, inquire about a Custom Built Unit |
| Viewing Methods: | 2" camcorder screen, and dual microscope eyepiece lenses can be used to view the measurement spot |
| TOP LAYER | SECOND LAYER | THIRD LAYER | FOURTH LAYER | ||||||
| FILM TYPE | Objective Lens Magnification | RANGE | std dev | RANGE | std dev | RANGE | std dev | Range | std dev |
| P1/P2/ITO/Oxide/Glass | 5X,10X |
100-30,000Å |
5Å |
100-10,000Å |
5Å |
100-2000Å |
5Å |
100-3,000Å |
5Å |
| Oxide/Si | 5X, 10X | 200-30,000Å |
2Å |
||||||
30,000-50,000Å |
5Å |
||||||||
| 5X | 200-10,000Å |
2Å |
|||||||
10,000-20,000Å |
5Å |
||||||||
| Nitride/Si | 5X, 10X | 150-20,000Å |
2Å |
||||||
| 5X | 150-15,000Å |
2Å |
|||||||
| Photoresist/Si | 5X, 10X, 5X | 500-20,000Å |
5Å |
||||||
| Nitride/Oxide/Si | 5X, 10X | 150-20,000Å |
5Å |
100-10,000Å |
5Å |
||||
| Poly/Oxide/Si | 5X, 10X | 100-5,000Å |
5Å |
100-10,000Å |
5Å |
|
|||
| Oxide/Poly/Oxide/Si | 5X, 10X | 100-10,000Å |
5Å |
0-10,000Å |
5Å |
0-10,000Å |
5Å |
||
| Oxide/Al | 5X, 10X, 5X | 2,000-20,000Å |
5Å |
||||||
| Photoresist/Cr | 5X, 10X, 5X | 500-20,000Å |
5Å |
||||||
| Oxide/NiFe | 5X, 10X, 5X | 2,000-20,000Å |
5Å |
||||||
| Photoresist/Glass | 5X, 10X, 5X | 500-20,000Å |
10Å |
||||||
| ITO/Oxide/Glass | 5X, 10X, 5X | 100-3,000Å |
2Å |
100-2,000Å |
2Å |
||||
| Very Thick Film | 5X | 50,000-150,000Å |
100Å |
||||||
| Customized film types can also be created for your applications. | |||||||||