| Scanning Range: | 380 nm to 950 nm, standard |
| Optional Range: | 200 nm to 2500 nm |
| Spectrum Resolution: | 2 nm in Visible 4 nm in NIR |
| Precision: | 0.2 nm |
| Measurement Speed: | 2 sec. |
| Measurement Spot: | 3 to 5 mm diameter |
| Sample View: | Not Available due to lack of Objective Lens Magnification |
| TOP LAYER | SECOND LAYER | THIRD LAYER | FOURTH LAYER | ||||||
| FILM TYPE | Magnification Not Available | RANGE | std dev | RANGE | std dev | RANGE | std dev | Range | std dev |
| P1/P2/ITO/Oxide/Glass | 1X Probe |
100-3,000Å |
3Å |
100-3,000Å |
3Å |
100-1,500Å |
3Å |
100-1,500Å |
3Å |
| Oxide/Si | 1X Probe |
200-30,000Å |
2Å |
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30,000 - 50,000Å |
5Å | ||||||||
50,000 - 100,000Å |
20Å | ||||||||
| Nitride/Si | 1X Probe |
150-20,000Å |
2Å |
||||||
| Photoresist/Si | 1X Probe |
500-20,000Å |
5Å |
||||||
| Nitride/Oxide/Si | 1X Probe |
150-20,000Å |
5Å |
1500-20,000Å | 5Å |
|
|
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| Poly/Oxide/Si | 1X Probe |
100-5,000Å |
5Å |
0-10,000Å | 5Å | ||||
| Oxide/Poly/Oxide/Si | 1X Probe |
100-10,000Å |
5Å |
0-10,000Å | 5Å | 100-10,000Å |
5Å |
||
| Oxide/Al | 1X Probe |
2,000-20,000Å |
5Å |
||||||
| Photoresist/Cr | 1X Probe |
500-20,000Å |
5Å |
||||||
| Oxide/NiFe | 1X Probe |
2,000-20,000Å |
5Å |
||||||
| Photoresist/Glass | 1X Probe |
500-20,000Å |
5Å |
||||||
ITO/Oxide/Glass |
1X Probe |
100-3000Å |
2Å | 100 - 2000Å | 2Å | ||||
| Very Thick Film | 1X Probe |
100,000-500,000Å |
100Å |
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| Customized film types can also be created for your applications. | 1X Probe |
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